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Instrument Equipment
Electrical Accessory
Mass Flow-Meter
Mass Flow-Meter

Production Description:

  Mass flow controller (MFC) can control the mass flow of gas in addition to measuring and controlling. MFM/MFC has the characteristics of non-misalignment due to temperature and pressure fluctuations, good repeatability, automatic measurement control, wide working pressure range, etc. With the development of microelectronics technology, measurement means and compensation methods have been greatly improved. At the beginning of the birth of D07 series products, because the traditional gas flow meter mainly uses volume measurement, it is easy to be affected by the temperature and pressure of the gas, and can not reflect the quality change of the gas, and the existing instrument can not measure the small flow well, and there are saturation problems for the larger flow, which seriously affects the measurement accuracy and many other shortcomings. It quickly gained market recognition, and because it does not misregister due to temperature and pressure fluctuations, good repeatability, automatic measurement control, wide working pressure range, high stability and reliability, it entered the field of industrialization, and gradually gained market recognition.

  Applications: vacuum, analytical instruments, petrochemical, automotive, electric power, research institutes

Product Advantages:

  Suitable for a wide range of flow control from 5SCCM to 20000SLM(N2). Suitable for a wide range of uses, in the general industrial market, has a large number of sales performance. A variety of types to choose from, to provide high pressure type, high stable flow type, metal seal type, fast response type large flow type and other products.

  Convenient supply voltage and control interface form. The supply voltage is 15V and 24V. The control interface is available in 9-pin and 15-pin, and also in 9-hole and 15-hole.

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Address:200 Zhaoxian ROAD,JIADING DISTRICT,SHANGHAI 201800,CHINA

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Shanghai Institute of Optics and Fine Mechanics.CAS, Chinese Academy of Sciences Opto Electronic Material & Equipment Dept
Address:No. 200 Zhaoxian ROAD,JIADING DISTRICT,SHANGHAI 201800,CHINA Tel:021-69522126 Fax:021-69522153
Technical Support:Qingyun Software