Production Description:

　　The equipment is mainly used in optoelectronic devices, new energy, solar cells, integrated circuit manufacturing and semiconductor materials for diffusion, oxidation, annealing and deposition processes, can be used for various process sizes. The equipment system has a precise microcomputer control system, a gas control system, a variety of fault alarm and safety interlock functions.

 Structural Introduction:

　　The horizontal diffusion furnace features quartz boats parallel to the horizontal plane, with single or multiple process tubes, occupying a smaller average footprint per tube. Compared to vertical diffusion furnaces, it offers superior process parameters between wafers, facilitating the robotic transfer of optical substrates and ensuring better uniformity of in-wafer process parameters.

The diffusion furnace consists of a control system, a boat loading/unloading system, a furnace heating system, and a gas control system, among others:

　　Control System: It employs a touch-screen all-in-one machine with universal sensor input and a control accuracy of 0.1%. This control system utilizes a dedicated high-precision temperature control module for temperature regulation. The main control unit (PLC) communicates with the instrument through an RS485 communication port, enabling fully automatic execution of temperature rise, hold, and drop curves through process programming (process setting and monitoring are done on an industrial computer). The temperature control module uses self-tuning PID for precise temperature control.

　　Boat Loading/Unloading System: Manual or automatic material loading/unloading (with two structures: manual quartz hook and cantilever paddle).

　　Heating System: The furnace body is composed of high-temperature furnace wires produced by KANTHAL , insulation wool from MORGAN (a company name) in the UK, high-quality 99% alumina ceramic insulators, imported ceramic fiber at the tube orifice, a stainless steel 304 shell, and other components. The equipment is equipped with temperature measurement thermocouples and over-temperature thermocouples.

　　Gas Circuit System: The gas circuit system includes mass flow controllers, pneumatic valves, stainless steel connectors, filters, pressure reducers, one-way nets, etc. The piping adopts corrosion-resistant stainless steel tubes with good sealing. Program interlocking is adopted between various mesh gates of the entire pipeline to ensure the interlocking and interaction between various valves. All gas pipeline and valves adopt 316L stainless steel materials, and flexible pipelines are connected using polytetrafluoroethylene tubing. Protective gases can be introduced (used under positive pressure <0.04MPa).

 Equipment Parameter: