1.Purpose:

Our dust-free oven series is used in semiconductor manufacturing, such as silicon wafers, gallium arsenide, lithium niobate, glass and other materials before gluing pre-baking, after gluing hard film baking and high temperature baking after development; Also suitable for electronic liquid crystal display, LCD, CMOS, IS, medicine, laboratory and other production and scientific research departments; It can also be used for drying, heat treatment, aging and other high temperature tests of non-volatile and non-flammable and explosive goods.

2.Features:

1. In the ordinary environment, it can ensure that the internal grade of the oven reaches Class100

2. All round argon welding, high temperature resistant silica gel breaking, SUS304# stainless steel electric heating production device, to prevent dust generated by the machine itself;

3. The air is supplied horizontally from the back to the front door (special air duct design) through the imported H.E.P.AFilter20"×20" device from the United States, filtration efficiency is 99.99%, Class100, exhaust port: 3"φ(with automatic opening and closing damper)

4. Forced air circulation mode. Double air duct circulation structure, uniform temperature field distribution, intelligent P.I.D temperature control system, temperature control accuracy.

3. Product Technical Parameters:

1. Main technical indicators:

Clean grade: Class100;

Temperature range: 60 ~ +300℃;

Temperature uniformity: 200℃±4℃;

Temperature fluctuation: ±0.5℃ (no load)

Temperature control accuracy: ±0.1℃;

Working size: W800×D600×H1300

Power supply: 380v,50Hz, 15KW

Net board: 2 pieces (height adjustable)

2. Box structure:

The oven is assembled by the box part, electrical control cabinet, electric heating and air duct system, reasonable structure, beautiful appearance;

Box material: The outer box is made of SUS304, 1.5mm brushed stainless steel, and cleaned by alkaline soda water to prevent fine dust;

Liner material: high quality SUS304, 2.0mm thick mirror stainless steel plate, and alkaline soda water to clean, to avoid the production of PARTICLE when baking;

Medium barrel material: high quality SUS304, 2.0mm thick mirror stainless steel plate, and alkaline soda water cleaning, oil removal and argon welding sealing processing (anti-pollution).

3. Temperature control system:

Taiwan "Xuan Rong" CAHO temperature controller, controller LED digital display and setting, PID automatic calculation, film setting, accuracy ±0.3%FS.

Signal source: PT100 thermal resistance ±0.5%.

Output controlled component: SSR has no contact signal output.

4. Perfect security protection measures:

Leakage circuit breaker, control line fuse device, over-temperature protection device, electric heating over-current protection device, motor over-current protection, machine abnormal buzzer warning, reverse prevention device, door safety switch.

5. Purchase equipment (additional charge) :

Programmable temperature controller, paperless recorder, three-color indicator light, baking rack.

Note: Dust-free grade and size can be customized upon request.